Masimo Semiconductor operates a complete compound semiconductor device fabrication line focused on the fabrication of custom devices, as well as development, prototyping, pilot production and manufacturing. Capabilities of the custom and production wafer processing laboratory at Masimo Semiconductor range from prototype development to full production and include CAD design of photolithographic mask sets, development of custom device processes, and routine fabrication.

Custom Power Converter

GaAs Space Solar Cell

Red LEDs

Space Applications

High Efficiency Space Cell

TPV Cells

Laser Diode

VCSEL Wafer close-up

VCSEL Wafer

Laser Power Converter

Foundry services include:

• Photolithography (2 micron critical dimension)
• Wet etch & dry etch (reactive ion etching)
• PEDVD silicon nitride, silicon oxynitride, silicon dioxide
• Metalization
• Dielectric deposition
• Optical thin film deposition
• Wafer polishing and lapping
• Automated wafer probing
• Wafer dicing (automated sawing & cleaving)
• Burn-in and life test
• Flip chips, discretes, beam leads, air bridges, via holes

OEM devices fabricated at Masimo Semiconductor include:

• Ridge waveguide devices
• VCSELs
• Red lasers
• Thermal photovoltaic devices
• Avalanche photo diodes
• Night vision photocathodes
• Optical modulation devices
• Optical frequency conversion devices
• Hybrid circuits
• Laser power converters
• GaAs P-I-N photodetectors
• InP P-I-N photo detectors
• High efficiency solar cells
• Microwave devices

Fabrication Process Services

At Masimo Semiconductor, we take epitaxial wafers through the full wafer fabrication process flow. This includes GaAs, InP, Silicon, InAs, lithium niobate or lithium tantalate wafers up to 4 inches in size. These wafers can be grown at Masimo Semiconductor’s facility or supplied by customers. Customers can also supply photomasks, or we can provide the engineering expertise to develop a process flow and CAD layout used to develop a new set of masks or cross-sectional concept drawings. We specify the process steps or collaborate and agree on parameter conditions to meet the desired device feature and implement the process in our fabrication line. This saves development time for our customers and provides a source of proprietary devices without the expense of a dedicated internal fabrication line.

Brochures & Request Information

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